Design Based Metrology System

RecipeDirector

CD-SEM recipe automatic creation utilizing design data

Features of RecipeDirector

• Off-line recipe creation without using a wafer and CD-SEM
• Automatic recipe creation by specifying measurement points and methods
• High Quality Recipes(Consistent - not dependent on operator skill)
• Server/Client style

DG-Analyzer

Supporting OPC evaluation and optimizing pattern
measurement in Lithography process

Features DG-Analyzer

• Post-measurement function for SEM images acquired in CG4000/CG5000 series
• Data analysis function such as SEM image view and measurement data confirmation
• Contour(pattern contour) extracting function utilizing measurement algorithm（Contour:Option）