Design Based Metrology System

CD-SEM Software
RecipeDirector and DG-Analyzer Software for Analyzing Your CD-SEM data



CD-SEM recipe automatic creation utilizing design data

Features of RecipeDirector

  • Off-line recipe creation without using a wafer and CD-SEM
  • Automatic recipe creation by specifying measurement points and methods
  • High Quality Recipes(Consistent - not dependent on operator skill)
  • Server/Client style


Supporting OPC evaluation and optimizing pattern
measurement in Lithography process

Features DG-Analyzer

  • Post-measurement function for SEM images acquired in CG4000/CG5000 series
  • Data analysis function such as SEM image view and measurement data confirmation
  • Contour(pattern contour) extracting function utilizing measurement algorithm(Contour:Option)