FT9500 Series High-Performance XRF Coating Thickness Gauge

Hitachi FT9500X Series High-Performance XRF Coating Thickness Gauge
High Brilliance Beam Measurements of Micro Spots and Thin Films



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Advanced x-ray microfocus technology achieves a high intensity beam with an actual beam size of less than 0.1mm in diameter. Consequently, the FT9500 Series is capable of measuring micro spots and thin film applications, such as lead frames, connectors, and flexible PCBs, which are difficult to measure with conventional models due to insufficient fluorescent X-ray intensities from samples. The system is also well-suited for RoHS&ELV analysis.

1. Ultra Thin Film and Multilayered Film Measurement

A poly capillary, X-ray focusing optics system enables micro beam size less than 0.1mm in diameter with high intensity that is equivalent to 50 times that of conventional collimator models used in Au plating measurement. As a result, the FT9500 series is capable of quantitative thickness measurements at single-digit nanometers of Au with high accuracy.  Further, it can simultaneously measure each layer's thickness of films in multilayered applications, such as Au/Pd/Ni/Cu and Au/Ni/Ti/Si.

2. Mapping

The mapped image generated with the micro beam is effective for the distribution analysis of plating thickness for specific elements.

3. Hazardous Substance Analysis (for RoHS and ELV compliance)

The FT9500 provides the best solution for quantitative analysis of hazardous substances. A high resolution semiconductor detector (liquid nitrogen free) is able to detect elements present in very low abundance. Examples include detection of Pb in Pb-free solder and electroless Nickel, which are commonly used in electrical devices, electronic equipment, and automotive components.

4. Particle Analysis

The high intensity micro beam combined with a high count rate detector make it possible to perform particle analysis. A CCD camera can identify particles, and then spectral subtraction can be used to qualitatively analyze the particles. (Al to U)

5. Data Processing

Microsoft® EXCEL is equipped with a statistical processing function that compiles measurement data such as STDEV, Mean, Max, Min, CV, and Cpk. Microsoft® WORD provides detailed measurement reports which can include the sample image.