FT150 Series High-Performance Fluorescent X-Ray Coating Thickness Gauge

Hitachi FT150 Series High-Performance Fluorescent X-Ray Coating Thickness Gauge
High Performance Fluorescent X-ray Coating Thickness Gauge Optimized for Thin-Film Measurements



The FT150 is a high-end fluorescent X-ray coating thickness gauge equipped with the polycapillary X-ray focusing optics and Vortex silicon drift detector. The improved X-ray detection efficiency enables high-throughput and high-precision measurement. A new design to secure wide space around the sample position ensures exellent operability.

1. High-precision measurement at micro spots

The FT150, having an irradiation spot size of 30µm (FWHM:17µm), achieved a fluorescent X-ray intensity twice that of the conventional instrument, the FT9500X. For typical application, measurement time to obtain the same precision is reduced by half.

2. Product lineup for various applications

Select a system suitable for your samples:

  • FT150 for measuring an ultra thin film and micro spots of electronic components
  • FT150L for measuring a large printed circuit boards up to 600mm x 600mm
  • FT150h for simultaneous measurement of Sn/Ni coating

3. Safe and easy to use

The newly designed door with a wide opening lets you set the sample very easily. The closed housing minimizes the risk of X-ray leakage.

4. Enhanced visibility of measurement spots

A large observation window and optimized part arrangement improved the visibility of the measurement position while the chamber door is closed.

5. Clear sample image

The higher-resolution sample observation camera with a fully digital zoom provides the clear image of the sample having several tens of micrometers in diameter at a desired observation position. The lighting unit for sample observation uses LED which has an extremely long lifetime.

6. New graphical user interfaces

  • Measurement methods and sample settings can be registered as an application icon. Any image such as a sample picture and an illustration of the multilayer can be used for an icon image. Measurement recipe can be selected quickly and easily.
  • The Measurement Navi Window guides the user through operation procedures.